http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020129619-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3b787b72661e925c53105d0307c609f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_706a02e41636ac0549b4abd9c9c23bcf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_973072b3eaa20d0332ec90aaf793e045 |
| publicationDate | 2020-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020129619-A |
| titleOfInvention | Substrate processing method and substrate processing apparatus |
| abstract | The present disclosure provides a substrate processing method and a substrate processing apparatus that are effective in suppressing pattern collapse of a concavo-convex pattern. A substrate processing method according to an exemplary embodiment replaces a liquid in a concave portion of a substrate having a concave-convex pattern on a surface with a solid-state reinforcing material, and maintains the reinforcing material in a solid state. At the same time, the substrate is subjected to a molecular weight reduction treatment for reducing the number of intermolecular bonds contained in the reinforcing material. [Selection diagram] Figure 8 |
| priorityDate | 2019-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.