http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101153616-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-6834 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-30105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-68354 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6835 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2006-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101153616-B1 |
| titleOfInvention | Method for manufacturing semiconductor chip and semiconductor chip |
| abstract | Plasma etching to a second surface of a semiconductor wafer having a first surface having an insulating film disposed in the divided region and a second surface disposed on an opposite side of the first surface and having a mask for determining the divided region. By removing the portions corresponding to the divided regions, the insulating film is exposed from the etching bottom, and then the exposed surface of the insulating film is charged by charge due to ions in the plasma. In the manufacturing method which removes the corner part which contact | connects the insulating film in an element formation area | region by continuing plasma etching in the set state, an isotropic etching is performed with respect to the said semiconductor wafer at some timing. do. |
| priorityDate | 2005-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.