http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020141124-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_32681f1832d227fe8df23d12a37f67a8 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 |
| filingDate | 2019-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc730a28cefa7b30ee7e969b366c2b9c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b0ff18bcd7d2d1bc7290d2e9036ce3d |
| publicationDate | 2020-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2020141124-A |
| titleOfInvention | Semiconductor manufacturing equipment and display manufacturing equipment including semiconductor manufacturing equipment members and semiconductor manufacturing equipment members |
| abstract | PROBLEM TO BE SOLVED: To provide a member for a semiconductor manufacturing apparatus capable of reducing particles. SOLUTION: A base material containing an aluminum member containing an aluminum element, an alumite layer provided on the surface of the aluminum member, and a particle-resistant layer provided on the alumite layer and containing polycrystalline ceramics. Provided is a member for a semiconductor manufacturing apparatus, wherein the aluminum member has an Al purity of 99.00% or more. [Selection diagram] Fig. 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022209934-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022209933-A1 |
| priorityDate | 2019-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.