| abstract |
The present invention relates to a novel, soluble, multi-ligand substituted metal oxide compound having a metal oxide film having improved stability, and a composition prepared therefrom and a method of using the same.nIn particular, the present invention relates to compounds having the following structure (I):nWherein M is a metal and n is from 1 to 20, and wherein at least one of R1, R2, R3 and R4 is i) and at least one of R1, R2, R3 and R4 is ii), wherein i) is An organic moiety having at least 2 carbons, and ii) an organic moiety.nThe invention also relates to spin-coatable compositions in which the compound of structure (I) is dissolved in a solvent. The invention further relates to a method of forming a coating on a patterned substrate using the spin coatable composition. |