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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
filingDate 2004-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0ff021ea8b204b50cfb77611756530d
publicationDate 2005-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-200537618-A
titleOfInvention An anodic oxidation process for devices of compound semiconductor
abstract An anodic oxidation process for devices of compound semiconductor has been disclosed. The anodization process can both improve uniformity and raise yield of devices.
priorityDate 2004-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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