| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-732
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-73 |
| filingDate |
1997-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be3f618c99360115e71b334a599f9137 |
| publicationDate |
1999-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1145890-A |
| titleOfInvention |
Method for manufacturing semiconductor device |
| abstract |
(57) [Problem] To simplify a process of forming a groove having a different depth and to enable the depth to be independently set. After patterning a silicon oxide film formed on a P-type silicon substrate, an element isolation groove having a wide opening width and a buried layer leading groove are formed simultaneously. The buried layer leading groove 6 is filled with a conductive film such as a tungsten film 8 to form a recess in the element separating groove 5-1. The semiconductor is exposed and etched at the bottom of the element isolation groove 5-1 to form an element isolation groove 5-2 penetrating the buried layer 2. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020305-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9614076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304830-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017126793-A |
| priorityDate |
1997-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |