http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3546977-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1995-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2004-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3546977-B2 |
| titleOfInvention | Semiconductor device manufacturing method and manufacturing apparatus |
| priorityDate | 1994-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419504262 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID65999 |
Total number of triples: 15.