| abstract |
In the prodn. of images, a Ag, Ag halide (AgX) or hardened binder image is produced in the emulsion of photographic material, having AgX emulsion layer(s) on an opt. subbed base, by exposure and development and then the layer(s) is subjected to image-wise plasma etching to remove the non-image areas. Prods. are used as photomasks in microelectronic mfg. processes. A thermostable, high-contrast image with high resoln. and good edge sharpness is obtd. |