| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a0b705aa1fabfa7fff29740872f18e9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q30-04 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G12B21-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N13-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B3-22 |
| filingDate |
2004-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2007-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa1be076ad9c10166018eb7b2056d4c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a2501629a3c96896c61a1d8392992f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5df0d8eba355c492a3ec8fb3d7e7e268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d6e7a6601ef5f6c938eaec27e1b4530
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dc0f4766524281ea94bc99253a5af4a |
| publicationDate |
2007-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7243441-B2 |
| titleOfInvention |
Method and apparatus for measuring depth of holes formed on a specimen |
| abstract |
A method an apparatus for measuring the depths of many fine holes formed in the surface of a sample by etching. Positional information on a plurality of hole patterns is acquired by scanning, with a stylus, the surface of the sample in which the hole patterns are formed by etching. The depths of the plurality of hole patterns are measured by scanning, with the stylus, bottom faces of the plurality of hole patterns and the surface of the sample in the respective vicinities of the hole patterns on the basis of the positional information that has been acquired. Information on distribution of the depths of the plurality of hole patterns is displayed on a screen on the basis of information on the measured depths of the plurality of hole patterns and the positional information on each of the hole patterns. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011100523-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10780507-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103165486-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10695844-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8359761-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103000578-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103165486-B |
| priorityDate |
2003-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |