http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010183090-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate | 2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b76dd2c8599711b3355cd0a9385b0ab3 |
| publicationDate | 2010-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010183090-A |
| titleOfInvention | Plasma processing apparatus and electrode member for plasma processing apparatus |
| abstract | Provided are a plasma processing apparatus and an electrode member for a plasma processing apparatus capable of extending the life of an electrode member constituting a lower electrode to reduce component consumption costs and preventing contamination inside the apparatus due to scattered substances. The purpose is to do. In a plasma processing apparatus that performs plasma processing on a plate-shaped workpiece, an electrode member 46 that contacts the lower surface of the workpiece is provided with a plate-shaped suction member 45 having a plurality of through holes 45a, a cooling plate 44, and the like. The sprayed film 65 is formed by spraying alumina on the upper surface of the adsorption member 45, and the edge of the hole 45 d where the through hole 45 a is opened is covered with the sprayed film 65. As a result, the consumption of the electrode member due to sputtering can be reduced, the life can be extended, the cost of component consumption can be reduced, and contamination of the inside of the apparatus due to scattered objects can be prevented. [Selection] Figure 12 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019016735-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015088687-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013168488-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101406524-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019511121-A |
| priorityDate | 2010-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.