http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008060565-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2007-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_420eea136560344e42256db30bb2aa54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7638ad3d6cd36a18e30f6b9c4e5f2106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58756dcf87c1842fb83a6256ef871583 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c169275688a4610f2e28cbb7c940c6e |
| publicationDate | 2008-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2008060565-A |
| titleOfInvention | Organic layer etching with three-layer resist |
| abstract | A method for forming a dual damascene feature in a porous low-k dielectric layer is provided. Vias are formed in a porous low-k dielectric layer. An organic planarization layer is formed on the porous low-k dielectric layer, and the organic layer fills the via. A photoresist mask is formed on the organic planarization layer. Providing a CO 2 containing etch gas, and from the CO 2 containing etching gas, generating a plasma for etching the organic planarization layer, by a process comprising, in organic planarization layer, features are etched. A trench is etched in the porous low-k dielectric layer using the organic planarization layer as a mask. The organic planarization layer is stripped off. [Selection] Figure 3 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011100765-A |
| priorityDate | 2006-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.