http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I416619-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2007-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d89815d9dd346d8b6605a7cc7b87d77b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4449d1ede7c21a0b53371d8f75316cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_589a69a78012e5805ff21a1155061590 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd56efd82db0a07fa6b6d0535555be12 |
| publicationDate | 2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-I416619-B |
| titleOfInvention | Method of performing actual flow verification |
| abstract | A method for determining an actual gas flow rate in a reaction chamber of a plasma processing system in provided. The method includes delivering gas by a gas flow delivery system controlled by a mass flow controller (MFC) to an orifice, which is located upstream from the reaction chamber. The method also includes pressurizing the gas to create a choked flow condition within the orifice. The method further includes measuring a set of upstream pressure values of the gas via a set of pressure sensors. The method yet also includes applying a calibration factor of a set of calibration factors to determine the actual flow rate. The calibration factor is a ratio of an average of the set of upstream pressure values to an average of a set of golden upstream pressure values, which is associated with an indicated flow rate for an MFC. |
| priorityDate | 2006-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985 |
Total number of triples: 16.