| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2019-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2d7b928b958a6cb5171d7ad5e725519
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ab7ac3c0cfdae45193df57096d50e79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f27139113789023851a25f22488dba5c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4faa1915707297114875bbea3941b95 |
| publicationDate |
2020-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20200056940-A |
| titleOfInvention |
Vacuum processing apparatus |
| abstract |
The uniformity of the temperature distribution on the placement surface of the placement table is improved. The vacuum processing apparatus has a heat-receiving member having a heat-receiving surface that receives heat from a heat source, and is formed inside the heat-receiving member along the heat-receiving surface, and has a refrigerant passage through which refrigerant flows, and the refrigerant passage is disposed on the side of the heat-receiving surface. The pair of second inner wall surfaces intersecting the first inner wall surface has a first groove portion extending in a direction inclined toward the first inner wall surface with respect to a direction in which the coolant moves. |
| priorityDate |
2018-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |