| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fce9598faf1cc1152c2a9048b91dff6d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0894 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J12-002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32577
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1977-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82183fb275fe27275af20ecf00d764a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da28b061c42d54b8b2ab5850c764f89e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1cfe637108cc4dbb011f96680acb8eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f593c7c1a5f52b34cf572950a45d11b |
| publicationDate |
1977-09-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2708720-A1 |
| titleOfInvention |
METHOD AND DEVICE FOR CHEMICAL TREATMENT OF A WORKPIECE USING GLIME DISCHARGE |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0146115-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0158271-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0158271-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0010138-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0146115-A3 |
| priorityDate |
1976-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |