http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3287042-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 1993-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2002-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-3287042-B2 |
| titleOfInvention | Method for manufacturing semiconductor device |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106053068-B |
| priorityDate | 1993-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.