| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00099
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00135
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00157 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-2415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-0835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-002 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-083
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-24 |
| filingDate |
2004-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006521279-A |
| titleOfInvention |
Thermal method for reducing dinitrogen difluoride and dinitrogen tetrafluoride concentrations in nitrogen trifluoride |
| abstract |
The concentration of undesired impurities dinitrogen difluoride and dinitrogen tetrafluoride in the nitrogen trifluoride mixture is determined in a container having an inner wall selected from electropolished metal, ceramic alumina, or sapphire. It is reduced by heating in the gas phase and recovering the nitrogen trifluoride product with reduced impurity concentration. This method is carried out at a temperature of about 150 ° C. to about 300 ° C., preferably the container is unfilled and the ratio of the container internal surface area to the container volume is minimized in the region of the container where the heating step is performed. . The method optionally further comprises contacting the container inner wall with a passivating composition comprising fluorine gas. |
| priorityDate |
2003-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |