http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013239446-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_347b5a7147a5d96032eda0149bc9a798 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2013-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11a7d740058a209926550f78371e479d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb937903523c8b188fc802bf47116fef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_62d815dae7a59a3cda1a258b69444d11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f8de9fffd2df3bec9e3d11c08e206b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61a858b30195cd7b934097bf4600e7a3 |
| publicationDate | 2013-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2013239446-A |
| titleOfInvention | Closed end for discharge vessel |
| abstract | Damage to plasma generated in a discharge vessel is reduced, and the replacement cycle of the discharge vessel is prolonged. A processing chamber 2 that partitions a processing space, a discharge vessel 3 having one end facing the inside of the processing chamber 2 and opened, and the other end closed, and a discharge vessel 3 are arranged around the discharge vessel 3 to generate an induction electric field. A plasma processing apparatus 1 that includes an antenna 4 that generates plasma inside a discharge vessel 3 under reduced pressure, and an electromagnet 9 that is disposed around the discharge vessel 3 and forms a divergent magnetic field inside the discharge vessel 3. Thus, a protruding portion 15 protruding toward the processing chamber is formed at the closed end of the discharge vessel 3. [Selection] Figure 1 |
| priorityDate | 2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.