| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_845ef2560bad0a6aba5a50d9fbbf24b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f3d1f16f1a77efff38ea46c662fd1493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S156-915
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-80 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32477
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00 |
| filingDate |
2002-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4457beff768ea83c071670b4cee5bdc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8519cbbca7c351e686a2894d4117a510 |
| publicationDate |
2002-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-02079538-A1 |
| titleOfInvention |
Cerium oxide containing ceramic components and coatings in semiconductor processing equipment |
| abstract |
A corrosion resistant component of semiconductor processing equipment such as a plasma chamber comprises a cerium oxide containing ceramic material as an outermost surface of the component. The cerium oxide containing ceramic material comprises one or more cerium oxides as the single largest constituent thereof. The component can be made entirely of the cerium oxide containing ceramic material or, alternatively, the cerium oxide containing ceramic can be provided as a layer on a substrate such as aluminum or an aluminum alloy, a ceramic material, stainless steel, or a refractory metal. The cerium oxide containing ceramic layer can be provided as a coating by a technique such as plasma spraying. One or more intermediate layers may be provided between the component and the cerium oxide containing ceramic coating. To promote adhesion of the cerium oxide containing ceramic coating, the component surface or the intermediate layer surface may be subjected to a surface roughening treatment prior to depositing the cerium oxide containing ceramic coating. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004063421-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4503270-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043971-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004190136-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7119032-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877002-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004063421-A3 |
| priorityDate |
2001-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |