http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0127988-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c99e17e4da077d1a60466cf1f6d19764 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6da834a81063773f40821fbc9d92795 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2000-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63e6d0173948df6ce22082d357507c89 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46d1e065dd0ff83be9488fcce1320cad |
| publicationDate | 2001-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | WO-0127988-A1 |
| titleOfInvention | Processing method |
| abstract | A processing method which comprises washing an organic material and particles adhered to an article to be processed with SC-1 solution, activating a mixture of N2 gas and H2 gas by a plasma to form an active gas species, introducing NF3 gas downstream from the active gas species to thereby activate the NF3 gas, exposing the surface of the article to be processed to the resultant active gas species of NF3 gas to react the active gas species with a film formed by natural oxidation on the article and form a formed film, and heating the article to a predetermined temperature to thereby vaporize the formed film. The method can be employed for reducing the contact resistance defined in the specification even in a fine hole or a narrow portion, while maintaining a good state after processing. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8398813-B2 |
| priorityDate | 1999-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.