| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
1996-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1996-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-960043011-A |
| titleOfInvention |
Chuck assembly and method for supporting a wafer to concentrate the plasma onto the surface of the substrate during plasma processing |
| abstract |
A method for supporting a substrate during processing in a plasma chamber, the substrate having a backside and an upper surface, the chuck assembly including a platform having a top portion having a substrate support surface for receiving and supporting the substrate during processing, Wherein the support surface has an area equal to the back surface area of the substrate on which it is located. And in an annular insulator ring around an upper portion of the platform, the annular ring has the same shape and a central hole that is slightly larger than the outer periphery of the upper portion of the platform, It is made of an insulator material with low dielectric constant. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100648401-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100650925-B1 |
| priorityDate |
1995-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |