http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007177258-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2005-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0430d24eb05cc991694f320a1522afb |
| publicationDate | 2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007177258-A |
| titleOfInvention | Plasma processing equipment |
| abstract | An object of the present invention is to provide a plasma processing apparatus capable of easily and freely setting a region to be processed by plasma of a workpiece. A plasma processing apparatus includes a head having a plurality of unit electrodes, a common electrode disposed opposite to the unit electrode via a workpiece, and a predetermined gap between the common electrode and the workpiece. A voltage is applied between the common electrode 2 and the unit electrode 42 so that plasma is generated by activating the gas supply means for supplying the gas and the gas supplied between the common electrode 42 and the workpiece. The power supply unit and a moving unit that relatively moves the head 4 and the work are provided, and the plurality of unit electrodes 42 are arranged in parallel along a direction different from the moving direction of the head 4 with respect to the work. While moving the head 4 and the work relatively, the position corresponding to the unit electrode 42 of the work is processed by the generated plasma. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012028781-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011100846-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111081559-A |
| priorityDate | 2005-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11643 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426105758 |
Total number of triples: 19.