| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate |
2015-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24b87277aabb6abb6289b31b70d7772a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e424095cf4e1ccd058ab686de144e1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3b26d5d5aef6df0406733fe19cec3a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf67c11d8b52869d01e4e067fe75eb69
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32166cd26992cf35d664820101b836b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_206b2a0d649d84495c85a1ebb6f36aad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a85b87c2d4821b06528e8a5237449d74
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e98ca00ff69a495807a03dd7ab5ef74 |
| publicationDate |
2016-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201635381-A |
| titleOfInvention |
Selective nitride etching |
| abstract |
A selective etching method for germanium nitride is provided. Exposing the tantalum nitride layer to a fluorinated gas and nitric oxide (NO), which is permeable to nitrous oxide (N2) in the plasmanO) with oxygen (O2nThe reaction is carried out to form. The method also includes defluorinating the substrate prior to turning off the plasma to increase the etch selectivity of the tantalum nitride. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I787239-B |
| priorityDate |
2014-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |