http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007515804-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-68 |
| filingDate | 2004-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007515804-A |
| titleOfInvention | Plasma equipment seasoning method and equipment therefor |
| abstract | A seasoning method for plasma equipment and equipment for the same are provided. In the seasoning method according to the present invention, before operating the plasma equipment and performing the plasma process, the silicon oxide (SiO x ) chemical species and the fluorocarbon compound (CF Y ) existing inside the plasma equipment process chamber. The intensity ratio of the optical radiation of the chemical species was measured, and it was judged whether the measured intensity ratio value was within the range of the normal state set in advance or outside the range of the normal state. After that, the reaction gas used in the plasma process is supplied to the inside of the process chamber so that the intensity ratio value measured according to the judgment result is switched to the normal state range, and the reaction gas component ratio is changed. Then, the intensity ratio is changed, and the inside of the process chamber is appropriately seasoned. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016167625-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009206164-A |
| priorityDate | 2003-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.