http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-3081885-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
filingDate | 1993-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2000-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2000-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-3081885-B2 |
titleOfInvention | Plasma processing equipment |
priorityDate | 1993-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 |
Total number of triples: 14.