| abstract |
[Problem] To provide a dense, high-strength magnesium aluminate-based sintered body with excellent corrosion resistance to halogen-based corrosive gases and plasmas thereof, and to provide a member for use in semiconductor manufacturing devices. [Solution] This magnesium aluminate-based sintered body contains magnesium aluminate as the main crystal phase, and, relative to the total mass (with the content of all constituent components expressed in terms of oxides), the total content of Zn and K (converted to ZnO and K20, respectively) is 30-500ppm. Further, by forming this member for use in semiconductor manufacturing devices from the aforementioned magnesium aluminate-based sintered body, said member can be used over a long period of time, and manufacturing costs member can be reduced. |