http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009530850-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-427 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate | 2007-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2009530850-A |
| titleOfInvention | Method for observing oxygen species and / or nitrogen species in a method for ashing a substrate with a plasma substantially free of oxygen and nitrogen |
| abstract | In the ashing method using plasma substantially free of oxygen and nitrogen, the method of observing the concentration of oxygen and / or nitrogen usually includes a step of observing plasma using optical emission. The amount of oxygen and nitrogen present in the plasma can be measured and correlated by the low concentration of oxygen and / or nitrogen present in a species different from the oxygen and nitrogen that are generally present in the plasma. . This process called “effect detection” is to observe spectral fluctuations specifically related to nitrogen and / or species other than oxygen due to the presence of trace amounts of oxygen and nitrogen species. Is used to quantitatively determine the amount of oxygen and / or nitrogen with a sensitivity of the order of 1, potentially of the order of 10 billion. |
| priorityDate | 2006-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.