patent/JP-3428927-B2

Predicate	Object
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
filingDate	1999-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2003-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2003-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-3428927-B2
titleOfInvention	Dry etching method
priorityDate	1999-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457623688 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2244 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556224 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559562 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14917

Total number of triples: 19.