| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68735
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6719
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate |
2011-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77a01770819b3294fe9bed3593ec41d0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93f55a84d5ac58a845aab63dadff3119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99da33631a8c38b2836e69dd03714d6e |
| publicationDate |
2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2012015514-A |
| titleOfInvention |
Movable grounding ring for plasma processing chamber |
| abstract |
A configuration that prevents ignition of unconfined plasma and shortens an RF return path is provided. A movable ground ring 400 of a movable substrate support assembly 310 is described. The movable ground ring 400 is fitted around the fixed ground ring 340 of the movable substrate support assembly 310 in the gap adjustable capacitively coupled plasma processing chamber 300 to provide an RF return path to the fixed ground ring 340. The semiconductor substrate supported in the substrate support assembly 310 is plasma processed. [Selection] Figure 3A |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020181839-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020181840-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7312233-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220045086-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7344676-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7264710-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7245107-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102505152-B1 |
| priorityDate |
2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |