| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7886f9841c03e2449d28f454ebbe1dc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2239-0478
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2239-1216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2027 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45555
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45544
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D39-2027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C28-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D39-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2020-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_500c5df4cbc1c1e1ec49ea80feb416f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b30631ed8818fb9f0eeb86aaeb1f7d13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56b345476b7a98f0998511d9c9232a1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85fdec454022c3a7274d448aef4ad603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7d6d31e594ceac73307738a89c589d1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a00fe93a02f238a2914d59804ee2780c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_23502d12c3e6c13b819314b4f96ae6da |
| publicationDate |
2020-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2020168625-A |
| titleOfInvention |
Coatings to enhance the properties and performance of substrate articles and equipment |
| abstract |
PROBLEM TO BE SOLVED: To provide a filter for a gas in which a filter containing a porous material matrix is subjected to an ALD metal coating process to reduce the pore size or bring a gradient of the pore size. SOLUTION: A porous material matrix filter is coated with a metal coating having a metal content in the range of 25 atomic percent to 40 atomic percent and a thickness of 10 nm to 40 nm by an ALD coating process, whereby the filter before coating is coated. A gas filter in which the pore volume is not changed by more than 5% and the matrix is characterized by pores with diameters in the range of 1-40 μm. [Selection diagram] None |
| priorityDate |
2015-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |