http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63274148-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 1987-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_53546ea5ceb0e03b3ca3cbf1f2cd5123 |
| publicationDate | 1988-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63274148-A |
| titleOfInvention | Microwave plasma processing device |
| abstract | PURPOSE: To dispense with the mechanical support of an antenna and to prevent the contamination due to a metal by a method wherein an antenna of a struc ture, wherein an antenna pattern is patterned on the outer wall of a vacuum container constituted of an insulator, is used as a microwave feeding means. n CONSTITUTION: An antenna pattern 41 is patterned on the outer wall of a dis charge container 4. The pattern 41 is formed into a slot type, is a Lisitano coil and is one, wherein slits of a length of (l) and a width of several mm are cut. If the length (l) of the slits is chosen in 1/2 of the wavelength of a microwave to be fed, a standing wave is generated. The container 4 is constitut ed of a microwave penetrating insulator of quartz glass, alumina or the like, such a metal as copper or silver is deposited on its outer wall and the metal is etched in a pattern type to form the antenna pattern 41. The thickness of the metal of the pattern has only to be larger sufficiently than the depth of a skin which is generated by a skin effect. The antenna pattern can be either the slot type or a helical type and the direction of an internal electric field to be generated is formed into the form of a concentric circle and intersects orthogonally with a magnetic field to be generated by an air-core coil 5. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5421891-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5429070-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02177326-A |
| priorityDate | 1987-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.