| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec0c7639355d2fe1a5a21a9b76c97373
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_117319d9441ca022455ce9347c2ae551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2b6ada098c577a21c1e29c7663d9007 |
| publicationDate |
2009-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2009246183-A |
| titleOfInvention |
Plasma etching method and computer-readable storage medium |
| abstract |
An etching shape can be controlled arbitrarily and precisely using a capacitively coupled plasma etching apparatus. In this capacitively coupled plasma etching apparatus, a first high frequency for plasma generation and a first high frequency for ion attraction are applied to a susceptor 12 from first and second high frequency power supplies 30 and 32, respectively. The variable DC voltage V DC output from the variable DC power source 74 is applied to the upper electrode 60 via the on / off switch 76 and the filter 82. The software used in the control unit 80 incorporates a program for continuously and variably controlling the DC voltage V DC according to the type, content, and conditions of the etching process. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011119471-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011108280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011187583-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017011127-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011199243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9496150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9373521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011119471-A2 |
| priorityDate |
2008-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |