| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate |
2013-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2016-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b24ad19bd274ec21060efc35c35caad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3df70002383f44b089a15308c54816d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36f86e141c43ae861e23b2061bc4d85b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1452f7078b0e3ed06f986ca0d3a12239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c711d7d4fcb09d3c3120d721134274a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14416c826396497ae4d3d460ae82087f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe70d300d4b161de56643205670ecd3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95dc475bd8db5d51d4fe447831b66b30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8ab58e588cec89a8a5719772b438831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54050cad0090f9c1a503cde5ce180cc4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fd65ed073a4cd924c2e102027d2300f |
| publicationDate |
2016-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-9324542-B2 |
| titleOfInvention |
Plasma processing method and plasma processing apparatus |
| abstract |
In a plasma processing apparatus of an exemplary embodiment, energy of microwaves is introduced from an antenna into the processing container through a dielectric window. The plasma processing apparatus includes a central introducing unit and a peripheral introducing unit. A central introduction port of the central introducing unit injects a gas just below the dielectric window. A plurality of peripheral introduction ports of the peripheral introducing unit injects a gas towards a periphery of the placement region. The central introducing unit is connected to with a plurality of first gas sources including a reactive gas source and a rare gas source through a plurality of first flow rate control units. The peripheral introducing unit is connected to with a plurality of second gas sources including a reactive gas source and a rare gas source through a plurality of second flow rate control units. |
| priorityDate |
2012-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |