http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4009087-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 2001-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-4009087-B2 |
| titleOfInvention | Magnetic generator in semiconductor manufacturing apparatus, semiconductor manufacturing apparatus, and magnetic field intensity control method |
| priorityDate | 2001-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419532576 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15629 |
Total number of triples: 15.