patent/JP-3640609-B2

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32183 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65G47-912
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203
filingDate	2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2005-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2005-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	JP-3640609-B2
titleOfInvention	Plasma processing apparatus, plasma processing system, performance confirmation system thereof, and inspection method
priorityDate	2000-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408

Total number of triples: 19.