| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-335 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2004-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2007-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007506282-A |
| titleOfInvention |
Method for cleaning a set of structures containing yttrium oxide in a plasma processing system |
| abstract |
A method for removing a set of particles from a set of structures comprising yttrium oxide is disclosed. The method includes exposing the set of structures to a first solution containing an oxidant for a first period. The method further includes removing the set of structures from the first solution and exposing the set of structures to a second solution containing the main reactant for a second period of time. The method further includes removing the set of structures from the second solution and polishing the set of structures with a third solution comprising the first mixture of acids for a third period. . |
| priorityDate |
2003-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |