| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6813f68bbadbcaae3828aa035190fede |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3345
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3342
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3341 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32899
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32119
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32357
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 |
| filingDate |
2018-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa28e78b33bd799173e22d9ed5f87951
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8aae32b2c294ceba2fbc3af10fa03e09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fdadd3f3cebfc3bde3d42ce6e4c85b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a79808b43fca876cbab6b377afbae04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b353f7ba49a192c4d8ae2671e69a6781 |
| publicationDate |
2019-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-201929034-A |
| titleOfInvention |
Plasma processing device and method thereof |
| abstract |
This case proposes a plasma processing device and method. In an exemplary implementation, the plasma processing apparatus includes a processing chamber. The plasma processing apparatus includes a bracket placed in the processing chamber. The bracket is operable to support a workpiece. The plasma processing apparatus includes a plasma chamber disposed vertically above the processing chamber. The plasma chamber includes a dielectric sidewall. The plasma processing apparatus includes a separation grid that separates a processing chamber from a plasma chamber. The plasma processing apparatus includes a first plasma source adjacent to the dielectric sidewall. The first plasma source is operable to generate a remote plasma above a separation grid in the plasma chamber. The plasma processing apparatus includes a second plasma source. The second plasma source is operable to generate a direct plasma below the separation grid in the plasma chamber. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111120235-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111120235-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I772862-B |
| priorityDate |
2017-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |