| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_224f8a2fec8ce0dd329687eb413b1c4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 |
| filingDate |
2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49b65b5d3f6e6a610a3bd55978172fca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00648543938e8bcb7045a4dc3430fbe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cc103372c007b47b66db2347e61296f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ff0eb03b7934784eefb62404c9af226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f14194176b70164740320439d08a8092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_268f6ec211dcc583a010ce7138f25812 |
| publicationDate |
2011-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
MY-142898-A |
| titleOfInvention |
Electrode member used in a plasma treating apparatus |
| abstract |
IN A PLASMA TREATING APPARATUS, A CERAMIC POROUS SUBSTANCE HAVING A THREE-DIMENSIONAL NETWORK STRUCTURE IN WHICH A FRAME PORTION FORMED OF CERAMIC CONTAINING ALUMINA IS PROVIDED CONTINUOUSLY LIKE A THREE-DIMENSIONAL NETWORK IS USED FOR THE MATERIAL OF AN ELECTRODE MEMBER FOR THE PLASMA TREATING APPARATUS TO BE ATTACHED TO THE FRONT SURFACE OF A GAS SUPPLYING PORT OF AN ELECTRODE FOR PLASMA GENERATION, AND A GAS FOR PLASMA GENERATION IS CAUSED TO PASS THROUGH A HOLE PORTION FORMED IRREGULARLY IN THE THREE-DIMENSIONAL NETWORK STRUCTURE. CONSEQUENTLY, THE DISTRIBUTION OF THE GAS TO BE SUPPLIED IS MADE UNIFORM TO PREVENT AN ABNORMAL DISCHARGE SO THAT UNIFORM ETCHING HAVING NO VARIATION CAN BE CARRIED OUT. |
| priorityDate |
2001-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |