| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a542402965408c0b2fe514a0154eb874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8c6eaa878ad99b84378735251232326e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5d04736b0b882a4f5a1e0e0e4cd8cbb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32136 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate |
2002-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5321f427fdcc331d3bde201f5ee9fa92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8c77c05ec4c2f6950b9f56a6c2dbad41 |
| publicationDate |
2003-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
WO-03054247-A2 |
| titleOfInvention |
Cleaning gas composition for semiconductor production equipment and cleaning method using the gas |
| abstract |
The present invention provides a cleaning gas for semiconductor or equipment for producing semiconductor or liquid crystal, comprising a fluorine gas containing 1 vol % or less of oxygen and/or oxygen-containing compound. The cleaning gas of the present invention enables an efficient production process of semiconductor device with a high etching rate to improve the cleaning efficiency which ensures excellent cost performance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7581549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011041223-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100393913-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2522662-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1932941-A1 |
| priorityDate |
2001-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |