http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007142174-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9c02bb431eedd6890ee8a87744945bc2 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00 |
| filingDate | 2005-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_05c5883110eeaaf4f035d846f31e7b3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6fec89e38aee859933d27c1aeebd59b1 |
| publicationDate | 2007-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007142174-A |
| titleOfInvention | Group III nitride semiconductor processing method |
| abstract | Provided is a method for processing a group III nitride semiconductor that can be processed uniformly and at high speed over the entire surface of the group III nitride semiconductor. A cylindrical rotary electrode 2 and a substrate stage 4 are arranged at an interval in a chlorine-containing gas atmosphere under atmospheric pressure or near atmospheric pressure. Plasma 10 is generated between the cylindrical rotary electrode 2 and the substrate stage 4 by supplying high-frequency power to the cylindrical rotary electrode 2. A region where the distribution of the surface processing amount in the entire region of the plasma 10 generated between the cylindrical rotary electrode 2 and the substrate stage 4 is fixed to the substrate stage 4 via the first substrate holder 11. The surface of the group III nitride semiconductor 6 is processed by bringing it into contact with the surface of the group III nitride semiconductor 6. [Selection] Figure 1A |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008306044-A |
| priorityDate | 2005-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.