http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-203595821-U
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2ece176998cc28723e566600178874d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01V8-10 |
| filingDate | 2013-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6db41ca3a5595acfdb75aad6fb6b249 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d9b74bf92d63d9947ed8fa4675f501b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc7ee48985f8eebc21e1c5ae74e7a333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_784178c010c94a73473a27c3c2feeea0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08d175c1c6a032da76f3926121c9789b |
| publicationDate | 2014-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CN-203595821-U |
| titleOfInvention | Error correcting device and plasma equipment |
| abstract | The utility model discloses an error correcting device and plasma equipment. The error correcting device comprises an error correcting sensor, a signal receiver and a cable coated by a protection layer. The error correcting sensor is connected with the signal receiver through the cable. The error correcting sensor includes a frame made of first anticorrosion material, and an infrared photosensitive lens fixed on the frame. The infrared photosensitive lens is coated by an anticorrosion layer made of second anticorrosion material. While in use, the signal receiver is arranged in a normal pressure environment, and the error correcting sensor is arranged in a vacuum ion environment, such that, as the frame and the infrared photosensitive lens of the error correcting sensor are made of the anticorrosion materials, the frame and the infrared lens are protected from being corroded by acid gas for plasma etching. Besides, for the signal receiver in the normal pressure environment, the internal circuit board is not influenced by plasma etching environment, and can be used for a long time. The plasma equipment using the aforementioned error correcting device has stable performance and long service life. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103592693-A |
| priorityDate | 2013-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.