http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823487
Outgoing Links
Predicate | Object |
---|---|
concordantIPC | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
level | 15^^<http://www.w3.org/2001/XMLSchema#integer> |
symbol | H01L21/823487 |
modified | 2013-01-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
title | MIS technology with a particular manufacturing method of vertical transistor structures, i.e. with channel vertical to the substrate surface |
type | http://data.epo.org/linked-data/def/cpc/SubGroup |
broader | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8234 |
Incoming Links
Total number of triples: 2312.