| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b6caea61bfde8a45e01a8deabff80d97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8833 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-011
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B10-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1259
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823487
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-845
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0688
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8833
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28132
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1112 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate |
2017-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a240773ddefc76d1573f25501d8442cd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_001458c92cb8335e87e3e081d0f46f31 |
| publicationDate |
2018-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-10083877-B1 |
| titleOfInvention |
Vertical field effect transistors including two-tier select gates and method of making the same |
| abstract |
A two-dimensional array of vertical field effect transistors is provided, which includes a first-tier structure and a second-tier structure. The first-tier structure includes a laterally alternating sequence of semiconductor rail structures and first dielectric isolation rails that alternates along a first horizontal direction. A first gate dielectric and a first gate electrode that laterally extend along a second horizontal direction are disposed between each neighboring pair of a semiconductor rail structure and a first dielectric isolation rail. The second-tier structure includes a laterally alternating sequence of composite rail structures and second dielectric isolation rails that alternates along the second horizontal direction. Each of the composite rail structures includes a laterally alternating plurality of semiconductor pillar structures and dielectric pillar structures. A second gate dielectric and a second gate electrode are disposed between each neighboring pair of a composite rail structure and a second dielectric isolation rail. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11569215-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11315836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11296113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11527623-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11742426-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022352324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022037483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728395-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10910279-B2 |
| priorityDate |
2017-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |