http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016087059-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0847
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0676
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41741
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823475
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823487
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-417
filingDate 2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0572fe247cbced89e371162453c62f71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec240496bd0da580e10ad399ecc76779
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3d472600923a7913d3b5004c72cd224
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48592d250130ed46906f2593224f5692
publicationDate 2016-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2016087059-A1
titleOfInvention Semiconductor Device and Method
abstract A vertical gate all around (VGAA) is provided. In embodiments, the VGAA has a nanowire with a first contact pad and a second contact pad. A gate electrode is utilized to help define a channel region within the nanowire. In additional embodiments multiple nanowires, multiple bottom contacts, multiple top contacts, and multiple gate contacts are utilized.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529625-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11239325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10950722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016190312-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529628-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10134642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10361128-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10074570-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019035922-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9997463-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109920733-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11552084-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10680112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031504-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021336012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109920733-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017005106-A1
priorityDate 2014-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014030859-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014091372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012187376-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3468413
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524988
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545842
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82901

Total number of triples: 64.