http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017208735-A1

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filingDate 2017-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2044135a3974a442745a2c57cd5dcbbe
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publicationDate 2017-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber WO-2017208735-A1
titleOfInvention Semiconductor device
abstract A current sense section (30) that detects overcurrent of a main semiconductor element (10) is disposed on a silicon carbide base body (100) on which the main semiconductor element (10) is also disposed. An isolating section (60) is disposed between the main semiconductor element (10) and the current sense section (30). The isolating section (60) has a function of suppressing electrical interference between the main semiconductor element (10) and the current sense section (30) on the side of the silicon carbide base body (100). The isolating section (60) is configured from a trench (61) that is provided at a predetermined depth from the front surface of the silicon carbide base body (100). In the trench (61), an insulating film (62) is provided along the inner wall of the trench (61), and a polysilicon layer (63) is provided on the inner side of the insulating film (62). Consequently, withstand voltage deterioration of the current sense section (30) can be eliminated.
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priorityDate 2016-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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