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filingDate 2016-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed264ec7057c703aac1e9a654be631d8
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publicationDate 2017-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9768252-B2
titleOfInvention Vertical gate-all-around field effect transistors
abstract Semiconductor devices and methods of forming the same are provided. A template layer is formed on a substrate, the template layer having a recess therein. A plurality of nanowires is formed in the recess. A gate stack is formed over the substrate, the gate stack surrounding the plurality of nanowires.
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