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filingDate 2016-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2017-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-9799749-B1
titleOfInvention Vertical transport FET devices with uniform bottom spacer
abstract Methods of fabrication and semiconductor structures includes vertical transport field effect transistors (VTFETs) having a uniform bottom spacer layer between different pattern density regions. The bottom spacer layer can be deposited by plasma vapor deposition.
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