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filingDate 2005-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2006-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2006303084-A
titleOfInvention Silicon carbide semiconductor device
abstract PROBLEM TO BE SOLVED: To provide a SiC semiconductor device that uses a semiconductor substrate having SiC formed on the surface of the Si substrate and does not cause a voltage drop corresponding to a band offset between the Si substrate and SiC without removing the Si substrate. A band offset is substantially eliminated by interposing a conductive layer 11 made of metal between an N + type low resistance layer 3 made of SiC and an N + type Si substrate 1. To be able to. As a result, the SiC in which the voltage drop corresponding to the band offset between the N + type Si substrate 1 and the N type SiC layer 2 does not occur while using the semiconductor substrate in which the N + type SiC substrate 1 is not removed from the N type SiC layer 2. A semiconductor device can be obtained. [Selection] Figure 1
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