http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101350577-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1461 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823487 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14632 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78642 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823885 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-092 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2012-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101350577-B1 |
| titleOfInvention | Semiconductor device manufacturing method and semiconductor device |
| abstract | The manufacturing method of a semiconductor device includes the steps of forming the first semiconductor layer 5a including the conductor layer 7 and donor impurities or acceptor impurities on the first semiconductor substrate, and the first semiconductor layer 5a. Forming the second insulating layer 8 so as to cover, thinning the thickness of the first semiconductor substrate 9 to a predetermined thickness, and forming the columnar structure on the first semiconductor layer 5a from the first semiconductor substrate. A step of forming the columnar semiconductor 1a having the?, A step of forming the first semiconductor region 6a in the columnar semiconductor 1a by diffusing impurities from the first semiconductor layer 5a, and a columnar phase after the impurities are diffused It has the process of forming the pixel of a solid-state imaging device using the semiconductor 1a. |
| priorityDate | 2011-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.