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filingDate 2020-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c81dede75393a938fb09a204a7521587
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publicationDate 2020-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CN-111410964-A
titleOfInvention Etchant compositions and methods of making semiconductor devices
abstract The present application discloses an etchant composition and a method of fabricating a semiconductor device, the composition comprising: an inorganic acid; about 0.01 parts by weight to about 0.5 parts by weight colloidal silica; about 0.01 parts by weight to about 30 parts by weight an ammonium-based additive; and about 20 parts by weight to about 50 parts by weight of a solvent, all of which are based on 100 parts by weight of the inorganic acid.
priorityDate 2019-01-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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