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filingDate 2019-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019237404-A1
titleOfInvention Method of forming stacked trench contacts and structures formed thereby
abstract Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a structure comprising a first contact metal disposed on a source/drain contact of a substrate, and a second contact metal disposed on a top surface of the first contact metal, wherein the second contact metal is disposed within an ILD disposed on a top surface of a metal gate disposed on the substrate.
priorityDate 2008-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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